Covers the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices. This book also covers both component materials and MEMS devices. Divided into two major parts, it looks at the mechanical properties of the materials used in MEMS and[...]
This edition of 'Reliability of MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, one of the most important hurdles to commercialization for microelectromechanical systems is covered in detail: the reliability of MEMS materials and devices. Due to their mi[...]