Reliability of MEMS: Testing of Materials and Devices

Covers the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices. This book also covers both component materials and MEMS devices. Divided into two major parts, it looks at the mechanical properties of the materials used in MEMS and [...]
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Covers the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices. This book also covers both component materials and MEMS devices. Divided into two major parts, it looks at the mechanical properties of the materials used in MEMS and explains the necessary measuring technologies.