Sökresultat för: Gary K. Fedder
CMOS-MEMS (Häftad)
avHenry Baltes, Oliver Brand, Gary K. Fedder, Chr Hierold
ISBN: 9783527310807 - UTGIVEN: 2005-02-28
Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applicat (Inbunden)
avSeries Editor:Oliver Brand, Series Editor:Gary K. Fedder
ISBN: 9783527312467 - UTGIVEN: 2006-02-28
Reliability of MEMS: Testing of Materials and Devices (Inbunden)
avSeries Editor:Oliver Brand, Series Editor:Gary K. Fedder
ISBN: 9783527314942 - UTGIVEN: 2008-02-29Covers the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices. This book also covers both component materials and MEMS devices. Divided into two major parts, it looks at the mechanical properties of the materials used in MEMS and[...]
