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  1. Reliability of Mems (Pocket)

    av

    Osamu (EDT) Tabata, Toshiyuki (EDT) Tsuchiya, Oliver (EDT) Brand

    ISBN: 9783527335015 - UTGIVEN: 2014-07

    This edition of 'Reliability of MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, one of the most important hurdles to commercialization for microelectromechanical systems is covered in detail: the reliability of MEMS materials and devices. Due to their mi[...]

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    från 643.00 kr