As semiconductor and electronic device sizes shrink to the nanoscale, contamination from ever smaller particles become critical to high yield and high performance. This contamination can take the form of dust, tiny particles of abrasive material left behind by polishing processes, airborne pollution[...]

Provides an advanced survey and guidance for scientists and engineers engaged in surface cleaning or handling the consequences of surface contamination. This title covers important fundamental aspects of surface contamination that are key to understanding the behavior of specific types of contaminan[...]