Secondary Ion Mass Spectrometry: Applications for Depth Profiling and Surface Characterization

Secondary ion mass spectroscopy is a technology used primarily to determine the surface chemistry and structure of any particular material. It is a crucial analytical tool in determining the quality and integrity of everything from semiconductor electronics materials to films and coatings used in al [...]
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Secondary ion mass spectroscopy is a technology used primarily to determine the surface chemistry and structure of any particular material. It is a crucial analytical tool in determining the quality and integrity of everything from semiconductor electronics materials to films and coatings used in all sorts of materials and products. It is especially useful in studying the surface characteristics of materials, as well as chemical surface adsorption and oxidative processes. This new book will bring the reader quickly up to speed on the essential principles of this technology, the latest equipment and instrumentation developments, the newest trends in measurement and analysis, and the many new applications that are being found for this type of spectrometry. Additional reading will be provided for further study.