Handbook of Silicon Based MEMS Materials and Technologies

Explains how bulk micromachining using silicon wafers, supplemented by surface micromachining techniques, produces in new solutions with SOI wafers as starting material. This title explains core concepts, including deep reactive ion etching (DRIE), lithography of high aspect ratio (HAR) structures, [...]
Visa längre beskrivning

Explains how bulk micromachining using silicon wafers, supplemented by surface micromachining techniques, produces in new solutions with SOI wafers as starting material. This title explains core concepts, including deep reactive ion etching (DRIE), lithography of high aspect ratio (HAR) structures, dry and wet etching, with SOI-starting material.