Sputtering Materials for VLSI and Thin Film Devices

Suitable for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications. It discusses materials science fundamentals, types of metallic materials for conductors [...]
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Suitable for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications. It discusses materials science fundamentals, types of metallic materials for conductors, diffusion barrier, data storage, and more.