Silicon VLSI Technology

For one-quarter/semester, senior/graduate level courses in Fabrication Processes. Unique in approach, this text provides an integrated view of silicon technology-with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in [...]
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For one-quarter/semester, senior/graduate level courses in Fabrication Processes. Unique in approach, this text provides an integrated view of silicon technology-with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies.